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Kinetics and Catalysis of the Oxidation of Titanium, Silicon, Germanium, and Gallium Arsenide

Nadezhda Petrovna Peksheva 1
Nadezhda Petrovna Peksheva
, 
Vyacheslav Mikhailovich Strukov 1
Vyacheslav Mikhailovich Strukov
1 Voronezh Polytechnic Institute
10.1070/RC1979v048n11ABEH002431
Published 30 November 1978
Communication , Volume 48, Issue 11, 1092-1108
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Peksheva N. P., Strukov V. M. Kinetics and Catalysis of the Oxidation of Titanium, Silicon, Germanium, and Gallium Arsenide // Russian Chemical Reviews. 1979. Vol. 48. No. 11. pp. 1092-1108.
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Peksheva N. P., Strukov V. M. Kinetics and Catalysis of the Oxidation of Titanium, Silicon, Germanium, and Gallium Arsenide // Russian Chemical Reviews. 1979. Vol. 48. No. 11. pp. 1092-1108.
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TY - JOUR
DO - 10.1070/RC1979v048n11ABEH002431
UR - https://rcr.colab.ws/publications/10.1070/RC1979v048n11ABEH002431
TI - Kinetics and Catalysis of the Oxidation of Titanium, Silicon, Germanium, and Gallium Arsenide
T2 - Russian Chemical Reviews
AU - Peksheva, Nadezhda Petrovna
AU - Strukov, Vyacheslav Mikhailovich
PY - 1979
DA - 1978/11/30
PB - ANO Editorial Board of the journal Uspekhi Khimii
SP - 1092-1108
IS - 11
VL - 48
ER -
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@article{1979_Peksheva,
author = {Nadezhda Petrovna Peksheva and Vyacheslav Mikhailovich Strukov},
title = {Kinetics and Catalysis of the Oxidation of Titanium, Silicon, Germanium, and Gallium Arsenide},
journal = {Russian Chemical Reviews},
year = {1979},
volume = {48},
publisher = {ANO Editorial Board of the journal Uspekhi Khimii},
month = {Nov},
url = {https://rcr.colab.ws/publications/10.1070/RC1979v048n11ABEH002431},
number = {11},
pages = {1092--1108},
doi = {10.1070/RC1979v048n11ABEH002431}
}
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Peksheva, Nadezhda Petrovna, and Vyacheslav Mikhailovich Strukov. “Kinetics and Catalysis of the Oxidation of Titanium, Silicon, Germanium, and Gallium Arsenide.” Russian Chemical Reviews, vol. 48, no. 11, Nov. 1979, pp. 1092-1108. https://rcr.colab.ws/publications/10.1070/RC1979v048n11ABEH002431.
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Abstract

A systematic account is given of the results of studies of the kinetics and catalysis of thermal gas-phase oxidation reactions of titanium, silicon, germanium, and GaAs. The influence of various factors (the nature of the reactant gas, the method of the preliminary treatment of the surface, and the nature of the substance oxidised) on the reaction kinetics has been estimated. The characteristics of the catalysis of heterogeneous oxidative processes are discussed and new ways of solving a number of practical problems are outlined.
The bibliography includes 133 references.