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Kinetics and Mechanism of the Dissolution and Oxidation of Semiconductors

Sergei Markovich Repinsky 1
Sergei Markovich Repinsky
1 Institute of Semiconductor Physics of USSR Academy of Sciences, Siberian Branch, Novosibirsk
10.1070/RC1983v052n06ABEH002860
Published 30 November 1982
Communication , Volume 52, Issue 6, 524-531
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Repinsky S. M. Kinetics and Mechanism of the Dissolution and Oxidation of Semiconductors // Russian Chemical Reviews. 1983. Vol. 52. No. 6. pp. 524-531.
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Repinsky S. M. Kinetics and Mechanism of the Dissolution and Oxidation of Semiconductors // Russian Chemical Reviews. 1983. Vol. 52. No. 6. pp. 524-531.
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TY - JOUR
DO - 10.1070/RC1983v052n06ABEH002860
UR - https://rcr.colab.ws/publications/10.1070/RC1983v052n06ABEH002860
TI - Kinetics and Mechanism of the Dissolution and Oxidation of Semiconductors
T2 - Russian Chemical Reviews
AU - Repinsky, Sergei Markovich
PY - 1983
DA - 1982/11/30
PB - ANO Editorial Board of the journal Uspekhi Khimii
SP - 524-531
IS - 6
VL - 52
ER -
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@article{1983_Repinsky,
author = {Sergei Markovich Repinsky},
title = {Kinetics and Mechanism of the Dissolution and Oxidation of Semiconductors},
journal = {Russian Chemical Reviews},
year = {1983},
volume = {52},
publisher = {ANO Editorial Board of the journal Uspekhi Khimii},
month = {Nov},
url = {https://rcr.colab.ws/publications/10.1070/RC1983v052n06ABEH002860},
number = {6},
pages = {524--531},
doi = {10.1070/RC1983v052n06ABEH002860}
}
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Repinsky, Sergei Markovich. “Kinetics and Mechanism of the Dissolution and Oxidation of Semiconductors.” Russian Chemical Reviews, vol. 52, no. 6, Nov. 1983, pp. 524-531. https://rcr.colab.ws/publications/10.1070/RC1983v052n06ABEH002860.
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Abstract

A generalised kinetic approach to the description of the dissolution of semiconductors (including the thermal oxidation of silicon and germanium) is based on a statistical thermodynamic analysis of the adsorption steps, and on an analysis of the structure of the activated complex and of the effects of solvation of the intermediate and the final products (calculated from model descriptions). 66 references.