The Deposition of Epitaxial Layers from the Vapour of Organometallic Compounds

Different methods of depositing epitaxial layers from the vapour of organometallic compounds have been compared. The stability of the deposition processes and new data on the preparation of epitaxial layers of A^IIIB^V, A^IIB^VI, and A^IVB^VI compounds have been examined.
The bibliography contains 206 references.