Home / Articles / Processes amplifying the effects of light on polymer layers

Processes amplifying the effects of light on polymer layers

Anatolii Veniaminovich Vannikov 1
Anatolii Veniaminovich Vannikov
, 
Antonina Dmitrievna Grishina 1
Antonina Dmitrievna Grishina
1 Frumkin Institute of Electrochemistry, Russian Academy of Sciences
10.1070/RC1993v062n01ABEH000004
Published 30 November 1992
Communication , Volume 62, Issue 1, 35-49
6
Share
Cite this
GOST
 | 
Cite this
GOST
Copy cite
Vannikov A. V., Grishina A. D. Processes amplifying the effects of light on polymer layers // Russian Chemical Reviews. 1993. Vol. 62. No. 1. pp. 35-49.
GOST all authors (up to 50)
Copy cite
Vannikov A. V., Grishina A. D. Processes amplifying the effects of light on polymer layers // Russian Chemical Reviews. 1993. Vol. 62. No. 1. pp. 35-49.
RIS
 | 
Cite this
RIS
Copy cite
TY - JOUR
DO - 10.1070/RC1993v062n01ABEH000004
UR - https://rcr.colab.ws/publications/10.1070/RC1993v062n01ABEH000004
TI - Processes amplifying the effects of light on polymer layers
T2 - Russian Chemical Reviews
AU - Vannikov, Anatolii Veniaminovich
AU - Grishina, Antonina Dmitrievna
PY - 1993
DA - 1992/11/30
PB - ANO Editorial Board of the journal Uspekhi Khimii
SP - 35-49
IS - 1
VL - 62
ER -
BibTex
 | 
Cite this
BibTex (up to 50 authors)
Copy cite
@article{1993_Vannikov,
author = {Anatolii Veniaminovich Vannikov and Antonina Dmitrievna Grishina},
title = {Processes amplifying the effects of light on polymer layers},
journal = {Russian Chemical Reviews},
year = {1993},
volume = {62},
publisher = {ANO Editorial Board of the journal Uspekhi Khimii},
month = {Nov},
url = {https://rcr.colab.ws/publications/10.1070/RC1993v062n01ABEH000004},
number = {1},
pages = {35--49},
doi = {10.1070/RC1993v062n01ABEH000004}
}
MLA
Cite this
MLA
Copy cite
Vannikov, Anatolii Veniaminovich, and Antonina Dmitrievna Grishina. “Processes amplifying the effects of light on polymer layers.” Russian Chemical Reviews, vol. 62, no. 1, Nov. 1993, pp. 35-49. https://rcr.colab.ws/publications/10.1070/RC1993v062n01ABEH000004.
Views / Visits / Downloads
21 / 21 / 9

Abstract

Processes bringing about amplification of the primary photoeffect in polymer layers through complex formation, autocatalysis, autosensitisation, and acid catalysis are discussed and their practical applications are considered. Attention is concentrated on highly sensitive photoresists for the photolithographic process used in advanced technologies. The bibliography includes 114 references.

References

1.
1
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR , 1948
2.
2
A. A. Krasnovskii
Zhur. Fiz. Khim. , 1956
3.
3
M. F. Shostakovskii
"Prostye Vinilovye Efiry" (Vinyl Ethers) , 1952
5.
5
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR , 1953
6.
6
V. B. Evstigneev
Dokl. Akad. Nauk SSSR , 1953
7.
Polymer materials for microlithography
Reichmanis E., Thompson L.F.
Chemical Reviews , 1989
8.
Kinetic analysis of the photoinitiated autocatalytic chain decomposition of phenyl azide. A molecular explosion in solution
Costantino J.P., Richter H.W., Lee Go C.H., Waddell W.H.
Journal of the American Chemical Society , 1985
9.
Lasers and Photopolymers
Carre C., Decker C., Fouassier J.P., Lougnot D.J.
Laser Chemistry , 1990
10.
10
T. A. Kryukova
"Polyaro-graficheskii Analiz" (Polarographic Analysis) , 1959
11.
11
T. T. Bannister
Diss. Abstr. , 1959
12.
Factors affecting cage escape yields following electron-transfer quenching
Olmsted J., Meyer T.J.
The Journal of Physical Chemistry , 1987
15.
15
A. S. Holt
"Research in Photosynthesis" , 1957
16.
16
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR , 1949
17.
XANTHENE DYES AS SENSITIZERS FOR THE PHOTOREDUCTION OF WATER
Mau A.W., Johansen O., Sasse W.H.
Photochemistry and Photobiology , 1985
18.
18
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR , 1951
19.
Grishina Antonina Dmitrievna, Tedoradze Marine Guramovna, Vannikov Anatolii Veniaminovich
Mendeleev Communications , 1992
20.
20
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR , 1954
21.
21
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR , 1958
24.
Triplet energy migration in solid films of photoreactive polymers
Farid S., Daly R.C., Moody R.E., Huang W.Y., Reiser A.
Macromolecules , 1991
27.
Novel method for preparation of photocrosslinkable poly(vinyl alcohol)
Ichimura K., Komatsu T.
Journal of Polymer Science, Part A: Polymer Chemistry , 1987
28.
Photosensitive poly(methacrylates) having styrylpyridinium and styrylquinolinium groups
Ichimura K., Oohara N.
Journal of Polymer Science, Part A: Polymer Chemistry , 1987
30.
30
V. B. Evstigneev
Dokl. Akad. Nauk SSSR , 1954
31.
On the photoreactivity of diacetylene containing thermoplastic block copolymers
Liang R., Reiser A.
Journal of Polymer Science, Part A: Polymer Chemistry , 1987
33.
33
M. B. Neiman
"Issledovanie Mekhanizma Okisleniya Butana" (Research on the Mechanism of the Oxidation of Butane) , 1939
34.
34
G. W. Robinson
J. Chem. Phys. , 1886
35.
35
Z. K. Maizus
Dokl. Akad. Nauk SSSR , 1960
36.
36
J. Billon
Bull. Soc. chim. France , 1960
38.
38
V. B. Evstigneev
Dokl. Akad. Nauk SSSR , 1956
39.
39
V. F. Gachkovskii
Biofizika , 1959
40.
40
A. A. Krasnovskii
Biofizika , 1960
41.
41
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR , 1950
42.
42
L. K. Obukhova
Izv. Akad. Nauk SSSR, Otd. Khim. Nauk , 1960
43.
Electronic structure of metal complexes containing π-cyclopentadienyl and related ligands. Part 1.—He(I) photoelectron spectra of some closed-shell metallocenes
Evans S., Green M.L., Jewitt B., Orchard A.F., Pygall C.F.
Journal of the Chemical Society Faraday Transactions 2 Molecular and Chemical Physics , 1972
44.
44
V. B. Evstigneev
Dokl. Akad. Nauk SSSR , 1953
45.
An Ionic Mechanism in a “Free-Radical“ System
Budyka M.F., Stunjas M.G., Lauhina O.D., Alfimov M.V.
The Journal of Photographic Science , 1989
46.
46
V. B. Evstigneev
Dokl. Akad. Nauk SSSR , 1955
47.
Amplification Processes in Photochemical Unconventional Systems
Leenders L.H.
The Journal of Photographic Science , 1978
48.
48
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR , 1955
50.
50
G. Glacomello
Gazzetta. , 1935
51.
51
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR , 1954
52.
52
V. B. Evstigneev
Dokl. Akad. Nauk SSSR , 1957
53.
Polyvinyl Alcohol Film Coating Effect on Novolac-Based Positive Electron Resist Sensitivity in X-Ray Lithography in an Atmospheric Environment
Okada K., Ohfuji T., Matsui J.
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes , 1985
54.
54
R. Livingston
J. Phys. Chem. , 1941
55.
55
G. A. Bogdanovskii
1958
56.
56
T. Iasui
Bull. Chem. Soc. Japan. , 1935
57.
Quantum yield evidence for a chain reaction in the photochemical decomposition of phenyl azide
Waddell W.H., Lee C.H.
Journal of the American Chemical Society , 1982
59.
Photoinitiated autocatalytic chain decomposition of phenyl azide
Go C.H., Waddell W.H.
Journal of the American Chemical Society , 1984
61.
Triplet—triplet absorption of thioxanthone and triplet energy transfer to some organic azides
Morita H., Mori S., Sakaguchi Y., Hayashi H.
Journal of Photochemistry and Photobiology A: Chemistry , 1991
62.
Triplet—triplet absorption and triplet energy transfer of thioxanthone in solid polymer matrices
Morita H., Sakaguchi Y., Hayashi H.
Journal of Photochemistry and Photobiology A: Chemistry , 1991
63.
Magnetic filed effect on sensitized photocrosslinking reaction of azidomethylated polytsyrene
Morita H., Uchino N., Nakamura Y., Yamaoka T.
Journal of Applied Polymer Science , 1989
64.
64
Chem. Zentr. II , 1931
65.
65
A. A. Krasnovskii
Biofizika , 1959
66.
66
V. B. Evstigneev
Dokl. Akad. Nauk SSSR , 1950
67.
67
N. N. Mel'nikov
Zhur. Obshch. Khim. , 1940
68.
Photopolymerization of multifunctional monomers in condensed phase
Decker C., Moussa K.
Journal of Applied Polymer Science , 1987
69.
69
B. Commoner
1958
70.
70
N. Bubnov
Biofizika , 1960
71.
71
Yu. A. Shlyapnikov
Vysokomol. Soed. , 1962
72.
72
A. F. Lukovnikov
"Starenie i Stabilizatsiya Polimerov" (Aging arid Stabilisation of Polymers) , 1963
74.
Possibilities for photoimaging using onium salts
Crivello J.V.
Polymer Engineering and Science , 1983
75.
Primary processes in the photosensitized polymerization of cationic monomers
Manivannan G., Fouassier J.P.
Journal of Polymer Science, Part A: Polymer Chemistry , 1991
76.
76
A. N. Terenin
"Fotokhimiya Krasitelei" (The Photochemistry of Dyes) , 1947
78.
Chemical amplification in the design of dry developing resist materials
Ito H., Willson C.G.
Polymer Engineering and Science , 1983
81.
Chemical amplification mechanisms for microlithography
Reichmanis E., Houlihan F.M., Nalamasu O., Neenan T.X.
Chemistry of Materials , 1991
82.
Acid formation and deprotection reaction by novel sulfonates in a chemical amplification positive photoresist
Schlegel L., Ueno T., Shiraishi H., Hayashi N., Iwayanagi T.
Chemistry of Materials , 1990
83.
Plasma developable photoresist systems based on chemical amplification
MacDonald S.A., Schlosser H., Ito H., Clecak N.J., Willson C.G.
Chemistry of Materials , 1991
85.
Positive, chemically-amplified aromatic methacrylate resist employing the tetrahydropyranyl protecting group
Taylor G.N., Stillwagon L.E., Houlihan F.M., Wolf T.M., Sogah D.Y., Hertler W.R.
Chemistry of Materials , 1991
86.
86
V. B. Evstigneev
Dokl. Akad. Nauk SSSR , 1958
88.
88
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR , 1946
89.
Time-resolved laser spectroscopy of the sensitized photolysis of iodonium salts
Fouassier J.P., Burr D., Crivello J.V.
Journal of Photochemistry and Photobiology A: Chemistry , 1989
90.
Excited states of ketones as electron donors—ketone—iodonium salt systems as photoinitiators for radical polymerization
Timpe H.-., Kronfeld K.-., Lammel U., Fouassier J.-., Lougnot D.-.
Journal of Photochemistry and Photobiology A: Chemistry , 1990
91.
Synthesis and characterization of photosensitive polyimides
Crivello J.V., Lee J.L., Conlon D.A.
Journal of Polymer Science, Part A: Polymer Chemistry , 1987
92.
A novel positive resist for deep UV lithography
Yamaoka T., Nishiki M., Koseki K., Koshiba M.
Polymer Engineering and Science , 1989
93.
Fluorine-containing photoreactive polymide 5: A novel positive-type polyimide based on photoinduced acidolysis
Omote T., Koseki K., Yamaoka T.
Journal of Polymer Science Part C Polymer Letters , 1990
94.
94
A. A. Krasnovskii
Fiziologiya Rastenii , 1957
95.
Nitrobenzyl ester chemistry for polymer processes involving chemical amplification
Houlihan F.M., Shugard A., Gooden R., Reichmanis E.
Macromolecules , 1988
96.
Photo- and thermochemistry of select 2,6-dinitrobenzyl esters in polymer matrixes: studies pertaining to chemical amplification and imaging
Neenan T.X., Houlihan F.M., Reichmanis E., Kometani J.M., Bachman B.J., Thompson L.F.
Macromolecules , 1990
97.
Determination of Acid Diffusion in Chemical Amplification Positive Deep-UV Resists
Schlegel L., Ueno T., Nobuaki Hayashi N.H., Takao Iwayanagi T.I.
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes , 1991
98.
Tetrahydropyranyl- and furanyl-protected polyhydroxystyrene in chemical amplification systems
Hesp S.A., Hayashi N., Ueno T.
Journal of Applied Polymer Science , 1991
99.
Vannikov Anatolii Veniaminovich, Grishina Antonina Dmitrievna, Tedoradze Marine Guramovna
Mendeleev Communications , 1991
100.
100
V. V. Zolotarev
Chem. Abs. , 1941
101.
101
M. F. Shostakovskii
Izv. Akad. Nauk SSSR, Otd. Khim. Nauk , 1960
102.
The electrochemical oxidation of N,N-dimethyl-p-toluidine
Melicharek M., Nelson R.F.
Journal of Electroanalytical Chemistry and Interfacial Electrochemistry , 1970
103.
103
L. N. Bell
Dokl. Akad. Nauk SSSR , 1956
104.
104
O. P. Osipova
Dokl. Akad. Nauk SSSR , 1950
105.
Photoresists based on the poly(hydroxyamines) and poly(hydroxyamino esters)
Kryukov A.Y., Vannikov A.V., Anikeev A.V., Kostenko L.I.
Chemistry of Materials , 1992
106.
106
F. Fichter
Helv. Chim. Acta , 1927
107.
107
M. F. Shostakovskii
Zhur. Obshch. Khim. , 1961
108.
Optically Developed Free-Radical Photosensitive Materials
Fotland R.A.
The Journal of Photographic Science , 1970
109.
109
F. Ficher
Bull. Soc. chim. France (4) , 1916
110.
110
M. F. Shostakovskii
Dokl. Akad. Nauk SSSR , 1960
111.
111
M. Calvin
1956
114.
115
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR , 1957
115.
Vannikov Anatolii Veniaminovich, Grishina Antonina Dmitrievna, Tedoradze Marine Guramovna
Mendeleev Communications , 1992
116.
Dry photochemical etching of Bi films
Vannikov A.V., Grishina A.D., Tedoradze M.G.
Journal of Materials Chemistry A , 1992