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Synthesis of thin-layer structures by the ionic layer deposition method

Valeri Pavlovich Tolstoy 1
Valeri Pavlovich Tolstoy
1 St. Petersburg State University, Scientific Research Institute of Chemistry
10.1070/RC1993v062n03ABEH000015
Published 30 November 1992
Communication , Volume 62, Issue 3, 237-242
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Tolstoy V. P. Synthesis of thin-layer structures by the ionic layer deposition method // Russian Chemical Reviews. 1993. Vol. 62. No. 3. pp. 237-242.
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Tolstoy V. P. Synthesis of thin-layer structures by the ionic layer deposition method // Russian Chemical Reviews. 1993. Vol. 62. No. 3. pp. 237-242.
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TY - JOUR
DO - 10.1070/RC1993v062n03ABEH000015
UR - https://rcr.colab.ws/publications/10.1070/RC1993v062n03ABEH000015
TI - Synthesis of thin-layer structures by the ionic layer deposition method
T2 - Russian Chemical Reviews
AU - Tolstoy, Valeri Pavlovich
PY - 1993
DA - 1992/11/30
PB - ANO Editorial Board of the journal Uspekhi Khimii
SP - 237-242
IS - 3
VL - 62
ER -
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@article{1993_Tolstoy,
author = {Valeri Pavlovich Tolstoy},
title = {Synthesis of thin-layer structures by the ionic layer deposition method},
journal = {Russian Chemical Reviews},
year = {1993},
volume = {62},
publisher = {ANO Editorial Board of the journal Uspekhi Khimii},
month = {Nov},
url = {https://rcr.colab.ws/publications/10.1070/RC1993v062n03ABEH000015},
number = {3},
pages = {237--242},
doi = {10.1070/RC1993v062n03ABEH000015}
}
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Tolstoy, Valeri Pavlovich. “Synthesis of thin-layer structures by the ionic layer deposition method.” Russian Chemical Reviews, vol. 62, no. 3, Nov. 1993, pp. 237-242. https://rcr.colab.ws/publications/10.1070/RC1993v062n03ABEH000015.
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Abstract

A review is presented of ionic layer deposition, one of the methods of synthesising thin-layer structures of a predetermined composition with very precise thinkness control on the surface of a support. Conditions for the synthesis of ultra-thin films of metal oxides, hydroxides, phosphates, chromates, sulfides, and tellurides on the surface of metals, semiconductors, and dielectrics are discussed. The advantages of the method are pointed out, including the possibility of synthesising layers in an automatic regime under mild conditions at room temperature on substrates of complex shape by using simple apparatus. The problems which prevent the wider use of the method are formulated, and ways of solving them are suggested. The bibliography includes 69 references.

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