Abstract
The methods of synthesis of interstitial phase films (transition metal carbide, nitride, boride, and hydride films) are described. Different versions of their chemical and physical deposition from the gas phase are compared and discussed. The available information about the structures, electronic structures, and physicochemical properties of the films (including alloyed and multilayer films) is surveyed and analysed. The bibliography includes 225 references.
References
1.
1
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR ,
1948
2.
2
A. A. Krasnovskii
Zhur. Fiz. Khim. ,
1956
3.
3
M. F. Shostakovskii
"Prostye Vinilovye Efiry" (Vinyl Ethers) ,
1952
4.
5.
5
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR ,
1953
6.
6
V. B. Evstigneev
Dokl. Akad. Nauk SSSR ,
1953
7.
7
E. Rabinowitch
"Photosynthesis" ,
1956
8.
8
V. N. Kondrat'ev
"Kinetika Reaktsii v Gazovoi Faze" (Kinetics of Reactions in the Gas Phase) ,
1959
9.
9
V. H. Lynch
Carnegie Inst. Year Book ,
1954
10.
10
T. A. Kryukova
"Polyaro-graficheskii Analiz" (Polarographic Analysis) ,
1959
11.
11
T. T. Bannister
Diss. Abstr. ,
1959
12.
12
V. B. Evstigneev
Dokl. Akad. Nauk SSSR ,
1950
13.
13
V. B. Evstigneev
Dokl. Akad. Nauk SSSR ,
1954
14.
14
V. B. Evstigneev
Zhur. Fiz. Khim. ,
1958
15.
15
A. S. Holt
"Research in Photosynthesis" ,
1957
16.
16
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR ,
1949
17.
17
V. B. Evstigneev
Dokl. Akad. Nauk SSSR ,
1958
18.
18
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR ,
1951
19.
19
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR ,
1959
20.
20
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR ,
1954
21.
21
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR ,
1958
22.
Sundgren J.-.
Thin Solid Films ,
1985
23.
Reichelt K., Jiang X.
Thin Solid Films ,
1990
24.
24
M. S. Ashkinazi
Dokl. Akad. Nauk SSSR ,
1951
25.
Chatterjee S., Sudarshan T.S., Chandrashekhar S.
Journal of Materials Science ,
1993
26.
MUSIL J., VYSKOČIL J., KADLEC S.
Physics of Thin Films - Advances in Research and Development ,
1993
27.
Rebenne H.E., Bhat D.G.
Surface and Coatings Technology ,
1994
28.
Sundgren J.-., Hultman L.
1995
29.
29
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR ,
1951
30.
30
V. B. Evstigneev
Dokl. Akad. Nauk SSSR ,
1954
31.
32.
Andrievski R.A.
Journal of Materials Science ,
1994
33.
Andrievskii R.A.
Russian Chemical Reviews ,
1994
34.
Bunshah R.F., Nimmagadda R., Dunford W., Movchan B.A., Demchishin A.V., Chursanov N.A.
Thin Solid Films ,
1978
35.
36
J. Billon
Bull. Soc. chim. France ,
1960
36.
Bunshah R.F., Deshpandey C.V.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films ,
1985
37.
SINGH S., RAMAKRISHNA K., SINGH A., SRIVASTAVA O.
International Journal of Hydrogen Energy ,
1989
38.
Li Y., Cheng Y.
Journal of Alloys and Compounds ,
1995
39.
Mattox D.M., McDonald J.E.
Journal of Applied Physics ,
1963
40.
41
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR ,
1950
41.
Randhawa H.
Thin Solid Films ,
1991
42.
43
N. Bunge
Ber. Deutsch. Chem. Ges. ,
1870
43.
Martin P.J., Netterfield R.P., Kinder T.J.
Thin Solid Films ,
1990
44.
Knotek O., Löffler F., Krämer G.
Surface and Coatings Technology ,
1993
45.
Johansson B.O., Hentzell H.T., Harper J.M., Cuomo J.J.
Journal of Materials Research ,
1986
46.
Genqing Y., Dazhi W., Xianghuai L., Xi W., Shichang Z.
Surface and Coatings Technology ,
1994
47.
Riviere J.P., Guesdon P., Delafond J., Denanot M.F., Farges G., Degout D.
Thin Solid Films ,
1991
48.
Byeli A.V., Fedotov S.A.
Surface Engineering ,
1994
49.
Spee C.I., Driessen J.P., Kuypers A.D.
Journal de Physique IV (Proceedings) ,
2007
50.
Cao L.X., Feng Z.C., Liang Y., Hou W.L., Zhang B.C., Wang Y.Q., Li L.
Thin Solid Films ,
1995
51.
Tsuda H., Youichirou Numasawa Y.N.
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes ,
1995
52.
Weber A., Nikulski R., Klages C.‐., Gross M.E., Brown W.L., Dons E., Charatan R.M.
Journal of the Electrochemical Society ,
1994
53.
Boumerzoug M., Mascher P., Simmons J.G.
Applied Physics Letters ,
1995
54.
Weber A., Poeckelmann R., Klages C.‐.
Applied Physics Letters ,
1995
55.
Fix R., Gordon R.G., Hoffman D.M.
Chemistry of Materials ,
1991
56.
Fix R., Gordon R.G., Hoffman D.M.
Chemistry of Materials ,
1993
57.
Ritala M., Leskelä M., Rauhala E., Haussalo P.
Journal of the Electrochemical Society ,
1995
58.
59
H. Linshitz
"Research in Photosynthesis" ,
1957
59.
Jensen J.A., Gozum J.E., Pollina D.M., Girolami G.S.
Journal of the American Chemical Society ,
1988
60.
Wayda A.L., Schneemeyer L.F., Opila R.L.
Applied Physics Letters ,
1988
61.
62
A. A. Krasnovskii
"Sbornik, Voprosy Khimicheskoi Kinetiki" (Symposium, Problems of Chemical Kinetics) ,
1955
62.
63
1930
63.
64
Chem. Zentr. II ,
1931
64.
Yabe K., Nishimura O., Fujihana T., Iwaki M.
Surface and Coatings Technology ,
1994
65.
Kasukabe Y., Ootubo J., Nagata S., Kishimoto M., Fujino Y., Yamaguchi S., Yukio Yamada Y.Y.
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes ,
1995
66.
Shibutami T., Kanzaki Y., Matsumoto O.
Journal of the Less Common Metals ,
1985
67.
Vogt K.W., Naugher L.A., Kohl P.A.
Thin Solid Films ,
1995
68.
Jain I.
International Journal of Hydrogen Energy ,
1990
69.
Sakaguchi H., Tsujimoto T., Adachi G.
Chemistry of Materials ,
1993
70.
71
Yu. A. Shlyapnikov
Vysokomol. Soed. ,
1962
71.
Noël J.‐., Houghton D.C., Este G., Shepherd F.R., Plattner H.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films ,
1984
72.
Knotek O., Böhmer M., Leyendecker T., Jungblut F.
Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing ,
1988
73.
Panjan P., Navinšek B., Žabkar A., Fišer J., Zalar A.
Vacuum ,
1990
74.
Lohmann R., Österschulze E., Thoma K., Gärtner H., Herr W., Matthes B., Broszeit E., Kloos K.-.
Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing ,
1991
75.
Yoshitake M., Tsutom Yotsuya T.Y., Soichi Ogawa S.O.
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes ,
1992
76.
77
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR ,
1948
77.
Mitterer C.
Journal of Solid State Chemistry ,
1997
78.
79
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR ,
1952
79.
Eguchi N., Grajewski V., Uchida H.H., Fromm E.
Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing ,
1991
80.
Mollart T.P., Baker M., Haupt J., Steiner A., Hammer P., Gissler W.
Surface and Coatings Technology ,
1995
81.
Baker M.A., Haupt J., Gissler W.
Zeitschrift fur Naturforschung - Section A Journal of Physical Sciences ,
1995
82.
Lengauer W.
Journal of Alloys and Compounds ,
1992
83.
Valvoda V.
Journal of Alloys and Compounds ,
1995
84.
Perry A.J.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films ,
1988
85.
86
V. B. Evstigneev
Dokl. Akad. Nauk SSSR ,
1958
86.
Manory R.R., Kimmel G.
Surface and Coatings Technology ,
1994
87.
Brunner J., Perry A.J.
Thin Solid Films ,
1987
88.
Schaffer J.P., Perry A.J., Brunner J.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films ,
1992
89.
Uedono A., Nanao S., Tanigawa S., Suzuki R., Ohdaira T., Mikado T., Ishibashi S.
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes ,
1995
90.
91
L. M. Vorob'eva
Biokhimiya ,
1956
91.
Laor A., Zevin L., Pelleg J., Croitoru N.
Thin Solid Films ,
1993
92.
Hayashi N., Murzin I.H., Sakamoto I., Ohkubo M.
Thin Solid Films ,
1995
93.
Chen J., Barnard J.A.
Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing ,
1995
94.
95
A. A. Krasnovskii
Fiziologiya Rastenii ,
1957
95.
Sue J.A.
Surface and Coatings Technology ,
1993
96.
BARNETT S.A.
Physics of Thin Films - Advances in Research and Development ,
1993
97.
98
W. Franke
Chem. Zentr. ,
1954
98.
Jiang C., Goto T., Hirai T.
Journal of Materials Science ,
1994
99.
Oh U.C., Je J.H., Lee J.Y.
Journal of Materials Research ,
1995
100.
Yang H.H., Je J.H., Lee K.-.
Journal of Materials Science Letters ,
1995
101.
102
F. Fichter
Helv. Chim. Acta ,
1922
102.
Wang D., Wang X., Yang G., Liu X., Jia Y., Zhou G., Li G.
Journal of Applied Physics ,
1995
103.
Yumoto H., Kaneko K., Ishihara M., Akasi K., Kaneko T.
Advanced Materials for Optics and Electronics ,
1995
104.
Valvoda V., Musil J.
Thin Solid Films ,
1987
105.
Mahéo D., Poitevin J.-.
Thin Solid Films ,
1994
106.
Jiang H.G., Tong H.Y., Lu K., Ding B.Z., Song Q.H., Hu Z.Q.
1994
107.
108
F. Fichter
Helv. Chim. Acta ,
1924
108.
Hultman L., Shinn M., Mirkarimi P.B., Barnett S.A.
Journal of Crystal Growth ,
1994
109.
Hultman L., Helmersson U., Barnett S.A., Sundgren J.‐., Greene J.E.
Journal of Applied Physics ,
1987
110.
Ma K.J., Bloyce A.
Surface Engineering ,
1995
111.
Efeoglu I., Arnell R.D., Tinston S.F., Teer D.G.
Surface and Coatings Technology ,
1993
112.
Jin P., Nakao S., Tanemura S., Maruno S.
Thin Solid Films ,
1995
113.
Broszeit E., Matthes B., Herr W., Kloos K.H.
Surface and Coatings Technology ,
1993
114.
115
A. A. Krasnovskii
Dokl. Akad. Nauk SSSR ,
1957
115.
Aromaa J., Ronkainen H., Mahiout A., Hannula S.-., Leyland A., Matthews A., Matthes B., Broszeit E.
Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing ,
1991
116.
117
V. V. Levchenko
Zhur. Obshch. Khim. ,
1948
117.
Westra K.L., Thomson D.J.
Thin Solid Films ,
1995
118.
Bartsch K., Leonhardt A., Wolf E., Schönherr M.
Journal of Materials Science ,
1991
119.
Hillel R., Maline M., Gourbilleau F., Nouet G., Carles R., Mlayah A.
Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing ,
1993
120.
Liu Y.J., Kim H.J., Egashira Y., Kimura H., Komiyama H.
Journal of the American Ceramic Society ,
1996
121.
122
S. R. Rafikov
Izv. Akad. Nauk SSSR, Otd. Khim. Nauk ,
1953
122.
Thornton J.A.
Annual Review of Materials Science ,
1977
123.
Kim S.K., Lee H.H.
Journal of Applied Physics ,
1995
124.
125
K. A. Andrianov
Vysokomol. Soed. ,
1960
125.
Ivanovskii A.L.
Russian Chemical Reviews ,
1996
126.
Lebugle A., Nyholm R., Mårtensson N.
Journal of the Less Common Metals ,
1981
127.
128
J. Wiemann
Bull. Soc. chim. France ,
1952
128.
129
J. Wiemann
Bull. Soc. chim. France ,
1955
129.
Netterfield R.P., Martin P.J., McKenzie D.R.
Journal of Materials Science Letters ,
1990
130.
Johansson B.O., Sundgren J.‐., Greene J.E., Rockett A., Barnett S.A.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films ,
1985
131.
Bendavid A., Martin P.J., Netterfield R.P., Kinder T.J.
Surface and Coatings Technology ,
1994
132.
Zheleva T., Oktyabrsky S., Jagannadham K., Vispute R.D., Narayan J.
Journal of Materials Research ,
1996
133.
Horita S., Tujikawa T., Akahori H., Kobayashi M., Hata T.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films ,
1993
134.
Nowak R., Maruno S.
Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing ,
1995
135.
Rivaud L., Barnett S.A., Greene J.E., Marciniec E.T.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films ,
1991
136.
Shih K.K., Dove D.B.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films ,
1990
137.
So F.C., Kolawa E., Zhao X., Nicolet M.
Thin Solid Films ,
1987
138.
Lei J., Okimura H., Brittain J.O.
Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing ,
1990
139.
140
1912
140.
Shappirio J.R., Finnegan J.J.
Thin Solid Films ,
1983
141.
Ryan J.G., Roberts S., Slusser G.J., Adams E.D.
Thin Solid Films ,
1987
142.
143
Friedl.
143.
Lee W.Y., Olive G., Sequeda F., Deline V., Huang T., Gorman G., Chung D.W.
Thin Solid Films ,
1988
144.
145
Friedl.
145.
Ryan J.G., Roberts S.
Thin Solid Films ,
1986
146.
Spulak R.G.
Journal of the Less Common Metals ,
1990
147.
Huiberts J.N., Griessen R., Rector J.H., Wijngaarden R.J., Dekker J.P., de Groot D.G., Koeman N.J.
Nature ,
1996
148.
Adachi G., Niki K., Nagai H., Shiokawa J.
Journal of the Less Common Metals ,
1982
149.
Sakaguchi H., Yagi Y., Taniguchi N., Adachi G., Shiokawa J.
Journal of the Less Common Metals ,
1987
150.
Schwarz K., Yee D.S., Cuomo J.J., Harper J.M.
Physical Review B ,
1985
151.
Tsai W., Delfino M., Fair J.A., Hodul D.
Journal of Applied Physics ,
1993
152.
Deen M.J.
Thin Solid Films ,
1987
153.
Hirashita N., Greene J.E., Helmersson U., Birch J., Sundgren J.‐.
Journal of Applied Physics ,
1991
154.
Igasaki Y., Mitsuhashi H.
Thin Solid Films ,
1980
155.
SINGH M.
International Journal of Hydrogen Energy ,
1996
156.
Roux L., Hanus J., Francois J.C., Sigrist M.
Solar Energy Materials ,
1982
157.
Bonelli M., Guzman L., Miotello A., Calliari L., Elena M., Ossi P.
Vacuum ,
1992
158.
Polato P., Franz H., Rustichelli F., Montecchi M., Piegari A.
Thin Solid Films ,
1994
159.
Logothetidis S., Alexandrou I., Papadopoulos A.
Journal of Applied Physics ,
1995
160.
Jönsson B., Hogmark S.
Thin Solid Films ,
1984
161.
162
1917
162.
163
Friedl.
163.
Page T.F., Hainsworth S.V.
Surface and Coatings Technology ,
1993
164.
165
Friedl.
165.
166
1917
166.
Oliver W.C., McHargue C.J., Zinkle S.J.
Thin Solid Films ,
1987
167.
Kothari D.C., Scardi P., Gialanella S., Guzman L.
Philosophical Magazine B ,
1990
168.
Söderlund E., Rowcliffe D.J.
1993
169.
Johansen O.A., Dontje J.H., Zenner R.L.
Thin Solid Films ,
1987
170.
Andrievski R.A., Anisimova I.A., Anisimov V.P.
Thin Solid Films ,
1991
171.
Growth of single‐crystal TiN/VN strained‐layer superlattices with extremely high mechanical hardness
Helmersson U., Todorova S., Barnett S.A., Sundgren J.‐., Markert L.C., Greene J.E.
Journal of Applied Physics ,
1987
172.
Danroc J., Aubert A., Gillet R.
Thin Solid Films ,
1987
173.
Knotek O.
Surface and Coatings Technology ,
1992
174.
Håkansson G., Sundgren J.-., McIntyre D., Greene J.E., Münz W.-.
Thin Solid Films ,
1987
175.
Knotek O., Barimani A.
Thin Solid Films ,
1989
176.
Randhawa H.
Thin Solid Films ,
1987
177.
Täschner C., Leonhardt A., Schönherr M., Wolf E., Henke J.
Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing ,
1991
178.
He X., Li W., Li H.
Journal of Materials Research ,
1994
179.
Holleck H., Lahres M.
Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing ,
1991
180.
Dua A.K., George V.C.
Thin Solid Films ,
1994
181.
Srivastava P.K., Vankar V.D., Chopra K.L.
Thin Solid Films ,
1988
182.
Cavaleiro A., Vieira M.T.
Surface Engineering ,
1994
183.
Holleck H., Schulz H.
Surface and Coatings Technology ,
1988
184.
Mitterer C., Rauter M., Rödhammer P.
Surface and Coatings Technology ,
1990
185.
Herr W., Matthes B., Broszeit E., Kloos K.H.
Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing ,
1991
186.
187
1954
187.
Riviere J.P., Guesdon P., Delafond J., Denanot M.F.
Journal of the Less Common Metals ,
1988
188.
Mitterer C., Übleis A., Ebner R.
Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing ,
1991
189.
Hammer P., Steiner A., Villa R., Baker M., Gibson P.N., Haupt J., Gissler W.
Surface and Coatings Technology ,
1994
190.
191
M. Matsui
Mem. Coll. Sci., Kyoto Univ. ,
1920
191.
192
E. Pannain
Rend. Classe Sci. fis. mat. nat. (5) ,
1908
192.
Miura K., Ishigami I., Kuno M., Kaneda H.
Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals ,
2017
193.
Bae Y.W., Lee W.Y., Besmann T.M., Blau P.J.
Applied Physics Letters ,
1995
194.
Movchan B.A., Demchishin A.V., Badilenko G.F., Bunshah R.F., Sans C., Deshpandey C., Doerr H.J.
Thin Solid Films ,
1982
195.
Hilz G., Holleck H.
International Journal of Refractory Metals and Hard Materials ,
1996
196.
Andrievski R.A.
International Journal of Refractory Metals and Hard Materials ,
1996
197.
Vepřek S., Reiprich S., Shizhi L.
Applied Physics Letters ,
1995
198.
Li D., Chu X., Cheng S., Lin X., Dravid V.P., Chung Y., Wong M., Sproul W.D.
Applied Physics Letters ,
1995
199.
Quinto D.T.
International Journal of Refractory Metals and Hard Materials ,
1996
200.
Quinto D.T., Wolfe G.J., Jindal P.C.
Thin Solid Films ,
1987
201.
202
G. Shiroa
Mem. Coll. Sci., Kyoto Univ. ,
1930
202.
Sun Y., Bloyce A., Bell T.
Thin Solid Films ,
1995
203.
Török E., Perry A.J., Chollet L., Sproul W.D.
Thin Solid Films ,
1987
204.
Perry A.J.
Thin Solid Films ,
1990
205.
Stone D.S., Yoder K.B., Sproul W.D.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films ,
1991
206.
Jiang X., Wang M., Schmidt K., Dunlop E., Haupt J., Gissler W.
Journal of Applied Physics ,
1991
207.
Mirkarimi P.B., Shinn M., Barnett S.A., Kumar S., Grimsditch M.
Journal of Applied Physics ,
1992
208.
Vancoille E., Celis J.P., Roos J.R.
Thin Solid Films ,
1993
209.
210
H. L. Wheeler
Chem. Zentr. ,
1908
210.
Mirkarimi P.B., Barnett S.A., Hubbard K.M., Jervis T.R., Hultman L.
Journal of Materials Research ,
1994
211.
Matthes B., Broszeit E., Kloos K.H.
Surface and Coatings Technology ,
1993
212.
Milošev I., Navinšek B.
Surface and Coatings Technology ,
1994
213.
Konyashin I.Y.
Thin Solid Films ,
1994
214.
215
N. D. Tomashov
Zh. Prikl. Khim. ,
1970
215.
216
A. P. Tomilov
Zhur. Prikl. Khim. ,
1959
216.
217
1925
217.
Holleck H.
Surface and Coatings Technology ,
1988
218.
Östling M., Nygren S., Petersson C.S., Norström H., Buchta R., Blom H.-., Berg S.
Thin Solid Films ,
1986
219.
Shih D.‐., Chang C.‐., Paraszczak J., Nunes S., Cataldo J.
Journal of Applied Physics ,
1991
220.
Papathanassopoulos K., Wenzl H.
Journal of Physics F Metal Physics ,
1982
221.
Salomons E.M., Feenstra R., de Groot D.G., Rector J.H., Griessen R.
Journal of the Less Common Metals ,
1987
222.
223
1959
223.
Gourbilleau F., Hillel R., Nouet G.
Nanostructured Materials ,
1994
224.
Andrievski R.A., Anisimova I.A., Anisimov V.P., Makarov V.P., Popova V.P.
Thin Solid Films ,
1995
225.
Chen J.G.
Chemical Reviews ,
1996
226.
227
B. Roetheke
1958