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Mechanism of thermal decomposition of silanes

Andrei Aleksandrovich Onischuk 1
Andrei Aleksandrovich Onischuk
, 
Viktor Nikolaevich Panfilov 1
Viktor Nikolaevich Panfilov
1 Institute of Chemical Kinetics and Combustion, Siberian Branch of the Russian Academy of Science
10.1070/RC2001v070n04ABEH000603
Published 30 November 2000
Communication , Volume 70, Issue 4, 321-332
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Onischuk A. A., Panfilov V. N. Mechanism of thermal decomposition of silanes // Russian Chemical Reviews. 2001. Vol. 70. No. 4. pp. 321-332.
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Onischuk A. A., Panfilov V. N. Mechanism of thermal decomposition of silanes // Russian Chemical Reviews. 2001. Vol. 70. No. 4. pp. 321-332.
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TY - JOUR
DO - 10.1070/RC2001v070n04ABEH000603
UR - https://rcr.colab.ws/publications/10.1070/RC2001v070n04ABEH000603
TI - Mechanism of thermal decomposition of silanes
T2 - Russian Chemical Reviews
AU - Onischuk, Andrei Aleksandrovich
AU - Panfilov, Viktor Nikolaevich
PY - 2001
DA - 2000/11/30
PB - ANO Editorial Board of the journal Uspekhi Khimii
SP - 321-332
IS - 4
VL - 70
ER -
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@article{2001_Onischuk,
author = {Andrei Aleksandrovich Onischuk and Viktor Nikolaevich Panfilov},
title = {Mechanism of thermal decomposition of silanes},
journal = {Russian Chemical Reviews},
year = {2001},
volume = {70},
publisher = {ANO Editorial Board of the journal Uspekhi Khimii},
month = {Nov},
url = {https://rcr.colab.ws/publications/10.1070/RC2001v070n04ABEH000603},
number = {4},
pages = {321--332},
doi = {10.1070/RC2001v070n04ABEH000603}
}
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Onischuk, Andrei Aleksandrovich, and Viktor Nikolaevich Panfilov. “Mechanism of thermal decomposition of silanes.” Russian Chemical Reviews, vol. 70, no. 4, Nov. 2001, pp. 321-332. https://rcr.colab.ws/publications/10.1070/RC2001v070n04ABEH000603.
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Abstract

Data on the mechanism of thermal decomposition of silanes are generalised. The main stages of the process are distinguished and characterised. Attention is concentrated on the elementary homogeneous reactions, deposition of silicon from the gas phase and formation of aerosols. Various models of formation of aerosols are considered. The results of theoretical and experimental investigations of this process are discussed. Data on the chemical composition of the solid product of silane pyrolysis (wall deposit and aerosol particles) are presented. It is noted that the hydrogen content in the solid product varies over wide limits. The bibliography includes 211 references.

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