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Photoacid generators. Application and current state of development

Nina Aleksandrovna Kuznetsova 1
Nina Aleksandrovna Kuznetsova
, 
Georgy Vasil'evich Malkov 2
Georgy Vasil'evich Malkov
, 
Boris Georgievich Gribov 3
Boris Georgievich Gribov
1 State Scientific Center "Institute of Organic Intermediates and Dyes", Moscow
2 Institute of Problems of Chemical Physics, Russian Academy of Sciences, Chernogolovka, Moscow region
3 Molecular Electronics Research Institute, Moscow, Zelenograd
10.1070/RCR4899
Published 30 November 2019
Review , RCR4899, Volume 89, Issue 2, 173-190
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Kuznetsova N. A., Malkov G. V., Gribov B. G. Photoacid generators. Application and current state of development // Russian Chemical Reviews. 2019. Vol. 89. No. 2. pp. 173-190.
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Kuznetsova N. A., Malkov G. V., Gribov B. G. Photoacid generators. Application and current state of development // Russian Chemical Reviews. 2019. Vol. 89. No. 2. pp. 173-190.
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TY - JOUR
DO - 10.1070/RCR4899
UR - https://rcr.colab.ws/publications/10.1070/RCR4899
TI - Photoacid generators. Application and current state of development
T2 - Russian Chemical Reviews
AU - Kuznetsova, Nina Aleksandrovna
AU - Malkov, Georgy Vasil'evich
AU - Gribov, Boris Georgievich
PY - 2019
DA - 2019/11/30
PB - ANO Editorial Board of the journal Uspekhi Khimii
SP - 173-190
IS - 2
VL - 89
ER -
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@article{2019_Kuznetsova,
author = {Nina Aleksandrovna Kuznetsova and Georgy Vasil'evich Malkov and Boris Georgievich Gribov},
title = {Photoacid generators. Application and current state of development},
journal = {Russian Chemical Reviews},
year = {2019},
volume = {89},
publisher = {ANO Editorial Board of the journal Uspekhi Khimii},
month = {Nov},
url = {https://rcr.colab.ws/publications/10.1070/RCR4899},
number = {2},
pages = {173--190},
doi = {10.1070/RCR4899}
}
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Kuznetsova, Nina Aleksandrovna, et al. “Photoacid generators. Application and current state of development.” Russian Chemical Reviews, vol. 89, no. 2, Nov. 2019, pp. 173-190. https://rcr.colab.ws/publications/10.1070/RCR4899.
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Abstract

Photoacid generators are used as components of photocurable polymer formulations and chemically amplified photoresists in microelectronics industry. In recent years, these compounds gained importance as components of various engineering materials. The review presents the classification of photoacid generators and summarizes data on photochemical processes giving photoacids. A special section is devoted to practical applications of photoacid generators and the current state of their development.

The bibliography includes 118 references.

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